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Please use this identifier to cite or link to this item: http://repository.li.mahidol.ac.th/dspace/handle/123456789/57991
Title: Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films
Authors: Rapeepan Kaewon
Chutchai Pawong
Ratchapak Chitaree
Tossaporn Lertvanithphol
Apichai Bhatranand
Rajamangala University of Technology Krungthep
Silpakorn University
Mahidol University
Thailand National Electronics and Computer Technology Center
King Mongkut s University of Technology Thonburi
Keywords: Materials Science;Physics and Astronomy
Issue Date: 1-Jan-2020
Citation: Optica Applicata. Vol.50, No.1 (2020), 69-81
Abstract: © 2020 WrocÅ‚aw University of Science and Technology. All rights reserved. An alternative polarization phase-shifting technique is proposed to determine the thickness of transparent thin-films. In this study, the cyclic interferometric configuration is chosen to maintain the stability of the operation against external vibrations. The incident light is simply split by a non-polarizing beam splitter cube to generate test and reference beams, which are subsequently polarized by a polarizing beam splitter. Both linearly polarized beams are orthogonal and counter -propagating within the interferometer. A wave plate is inserted into the common paths to introduce an intrinsic phase difference between the orthogonal polarized beams. A transparent thin-film sample, placed in one of the beam tracks, modifies the output signal in terms of the phase retardation in comparison with the reference beam. The proposed phase-shifting technique uses a moving mirror with a set of “fixed” polarizing elements, namely, a quarter-wave retarder and a polarizer, to facilitate phase extraction without rotating any polarizing devices. The measured thicknesses are compared with the measurements of the same films acquired using standard equipment such as the field-emission scanning electron microscope and spectroscopic ellipsometer. Experimental results with the corresponding measured values are in good agreement with commercial measurements. The system can be reliably utilized for non-destructive thickness measurements of transparent thin -films.
URI: http://repository.li.mahidol.ac.th/dspace/handle/123456789/57991
metadata.dc.identifier.url: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85088315864&origin=inward
ISSN: 18997015
00785466
Appears in Collections:Scopus 2020

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