C. PawongR. ChitareeC. SoankwanMahidol University2018-05-032018-05-032011-12-012011 Asia Communications and Photonics Conference and Exhibition, ACP 2011. (2011)2-s2.0-84864105786https://repository.li.mahidol.ac.th/handle/123456789/11751This research is based on the Fresnel's equations and the ellipsometric technique that investigate the sample of SiO 2 thin-film on Si substrate. The investigation is made by a probing beam which is in the form of a rotating linearly polarized light generated by the polarizing Mach-Zehnder interferometer (pMZi). The detection of the changed polarization states of the incident light due to reflection on the sample surfaces led to a set of unique characteristics describing a thin-film substrate system in terms of ellipsometric parameters φ and Δ. SiO 2 thin-films were chosen to study because of their well known characteristics. The accuracy of measurements was confirmed by comparisons to calculated values derived from Fresnel's equations and a standard instrument. The results clearly reveal a feasibility of using the rotating linearly polarized light produced by pMZi for a non-destructive characterization of the thin-film system. © 2011 SPIE-OSA-IEEE.Mahidol UniversityComputer ScienceEngineeringMaterials SciencePhysics and AstronomyConference PaperSCOPUS