V. W.L. ChinR. J. EganT. OsotchanM. R. VaughanS. C. AndersonMacquarie UniversityAustralian National UniversityThe University of SydneyPacific Solar Pty Ltd.Mahidol University2018-07-042018-07-041996-08-15Journal of Applied Physics. Vol.80, No.4 (1996), 2521-2523002189792-s2.0-0348249633https://repository.li.mahidol.ac.th/handle/20.500.14594/17840By using a contactless double crystal x-ray diffraction technique with either photoluminescence or infrared intersubband absorption and theoretical calculations, it is possible to determine the dimensions and composition of a three layered multiple quantum well (MQW) structure accurately. A strained AlGaAs/AlAs/InGaAs double barrier (DB) three layered MQW structure was used to demonstrate this. Moreover, it is shown that this structure is well suited for infrared photodetection in the 3 μm wavelength region, based on intersubband absorption. The compositions and thicknesses evaluated are in good agreement, and transmission electron microscopy is utilized to confirm the thicknesses. © 1996 American Institue of Physics.Mahidol UniversityPhysics and AstronomyArticleSCOPUS10.1063/1.363036