C. PawongR. ChitareeC. SoankwanMahidol University2018-05-032018-05-032011-12-01Proceedings of SPIE - The International Society for Optical Engineering. Vol.8308, (2011)0277786X2-s2.0-84855763349https://repository.li.mahidol.ac.th/handle/20.500.14594/11755This research is based on the Fresnel's equations and the ellipsometric technique that investigate the sample of SiO 2 thinfilm on Si substrate. The investigation is made by a probing beam which is in the form of a rotating linearly polarized light generated by the polarizing Mach-Zehnder interferometer (pMZi). The detection of the changed polarization states of the incident light due to reflection on the sample surfaces led to a set of unique characteristics describing a thin-film substrate system in terms of ellipsometric parameters ψand ΔSiO 2 thin-films were chosen to study because of their well known characteristics. The accuracy of measurements was confirmed by comparisons to calculated values derived from Fresnel's equations and a standard instrument. The results clearly reveal a feasibility of using the rotating linearly polarized light produced by pMZi for a non-destructive characterization of the thin-film system. © 2011 SPIE-OSA-IEEE.Mahidol UniversityComputer ScienceEngineeringMaterials ScienceMathematicsPhysics and AstronomyConference PaperSCOPUS10.1117/12.904420