Chatchawal WongchoosukAnurat WisitsoraatDitsayut PhokharatkulAdisorn TuantranontTeerakiat KerdcharoenMahidol UniversityThailand National Electronics and Computer Technology Center2018-09-242018-09-242010-08-01Sensors. Vol.10, No.8 (2010), 7705-7715142482202-s2.0-77957231501https://repository.li.mahidol.ac.th/handle/20.500.14594/28660In this work we have fabricated hydrogen gas sensors based on undoped and 1 wt% multi-walled carbon nanotube (MWCNT)-doped tungsten oxide (WO3) thin films by means of the powder mixing and electron beam (E-beam) evaporation technique. Hydrogen sensing properties of the thin films have been investigated at different operating temperatures and gas concentrations ranging from 100 ppm to 50,000 ppm. The results indicate that the MWCNT-doped WO3thin film exhibits high sensitivity and selectivity to hydrogen. Thus, MWCNT doping based on E-beam co-evaporation was shown to be an effective means of preparing hydrogen gas sensors with enhanced sensing and reduced operating temperatures. Creation of nanochannels and formation of p-n heterojunctions were proposed as the sensing mechanism underlying the enhanced hydrogen sensitivity of this hybridized gas sensor. To our best knowledge, this is the first report on a MWCNT-doped WO3hydrogen sensor prepared by the E-beam method. © 2010 by the authors.Mahidol UniversityBiochemistry, Genetics and Molecular BiologyChemistryEngineeringPhysics and AstronomyArticleSCOPUS10.3390/s100807705