High-pressure sensor based on fiber in-line Mach-Zehnder interferometer

Abstract

© 2015 SPIE. A fiber in-line Mach-Zehnder interferometer based on an inner air-cavity is presented for high-pressure measureement. The inner air-cavity is fabricated by use of femtosecond laser micromachining together with fusion splicing technique. A micro-channel is created on the top of the inner air-cavity to allow the high pressure gas to flow in. The fiber in-line device is featured with miniature size, good robustness and excellent operation stability while exhibiting a high pressure sensitivity of 8,239 pm/MPa.