Publication:
Nanostructured gas sensors by electron beam evaporation

dc.contributor.authorChatchawal Wongchoosuken_US
dc.contributor.authorAnurat Wisitsoraaten_US
dc.contributor.authorAdisorn Tuantranonten_US
dc.contributor.authorTeerakiat Kerdcharoenen_US
dc.contributor.otherMahidol Universityen_US
dc.contributor.otherNational Electronic and Computer Technology Centeren_US
dc.date.accessioned2018-05-03T08:08:58Z
dc.date.available2018-05-03T08:08:58Z
dc.date.issued2011-08-12en_US
dc.description.abstractElectron beam (E-beam) evaporation process offers extensive possibilities for controlling film structure and morphology with desired properties such as dense coating, high thermal efficiency, low contamination, high reliability and high productivity. In this work, we have applied the E-beam process to fabricate nanostructured gas sensors, i.e., WO 3 , SnO 2 , CNT-WO 3 , CNT-SnO 2 . The nanostructure sensing elements were characterized by scanning electron microscopy and transmission electron microscopy. Various gases with variable concentrations were used to test the sensing properties and selectivity of the gas sensors at different operating temperatures. Based on the operating temperatures within a range of 350-400°C, the SnO 2 and WO 3 gas sensors were found to exhibit good response to alcohol and hydrogen, respectively. Doping CNT in SnO 2 and WO 3 dramatically improves the sensitivity and selectivity of the gas sensors. Moreover, CNT can reduce the operating temperature (from around 350-400°C to 250°C) leading to reduction in power consumption which is one of the major problems for metal oxide gas sensor. The sensing mechanism of these gas sensors will be demonstrated. © 2011 IEEE.en_US
dc.identifier.citationECTI-CON 2011 - 8th Electrical Engineering/ Electronics, Computer, Telecommunications and Information Technology (ECTI) Association of Thailand - Conference 2011. (2011), 10-13en_US
dc.identifier.doi10.1109/ECTICON.2011.5947757en_US
dc.identifier.other2-s2.0-79961224462en_US
dc.identifier.urihttps://repository.li.mahidol.ac.th/handle/123456789/11776
dc.rightsMahidol Universityen_US
dc.rights.holderSCOPUSen_US
dc.source.urihttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=79961224462&origin=inwarden_US
dc.subjectComputer Scienceen_US
dc.subjectEngineeringen_US
dc.titleNanostructured gas sensors by electron beam evaporationen_US
dc.typeConference Paperen_US
dspace.entity.typePublication
mu.datasource.scopushttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=79961224462&origin=inwarden_US

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