Simple preparation of nanoporous ITO film with novel sparking method
Issued Date
2022-03-15
Resource Type
ISSN
0167577X
eISSN
18734979
Scopus ID
2-s2.0-85121966297
Journal Title
Materials Letters
Volume
311
Rights Holder(s)
SCOPUS
Bibliographic Citation
Materials Letters Vol.311 (2022)
Suggested Citation
Thongpan W., Kumpika T., Kantarak E., sroila W., Louloudakis D., Ručmanc S., Thongsuwan W., Singjai P. Simple preparation of nanoporous ITO film with novel sparking method. Materials Letters Vol.311 (2022). doi:10.1016/j.matlet.2021.131591 Retrieved from: https://repository.li.mahidol.ac.th/handle/123456789/86924
Title
Simple preparation of nanoporous ITO film with novel sparking method
Author's Affiliation
Other Contributor(s)
Abstract
We present a practical and simple method for the fabrication of nanostructured, highly transparent and conductive, porous tin-doped indium oxide (ITO) thin films via a novel sparking method. The pore structure consists of the densely packed secondary nanoparticles, which is the highlight of our sparking method, was observed through FE-SEM images. The crystallization and oxidation of the films occurred during the post-annealing process, where the XRD patterns confirmed the polycrystalline in nature and crystallizes in a cubic structure of In2O3. Our porous ITO films provide good conductivity with resistivity of 4.6 × 10−3 Ω.cm and large transmittance of 84% for films prepared at 160 s deposition time with an indium/tin atomic ratio of 90:10 and post-annealed at 500 °C for 3 h, which are potential materials for optoelectronic applications.