Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique
5
Issued Date
2022-10-01
Resource Type
ISSN
01469592
eISSN
15394794
Scopus ID
2-s2.0-85139402534
Pubmed ID
36181210
Journal Title
Optics Letters
Volume
47
Issue
19
Start Page
5156
End Page
5159
Rights Holder(s)
SCOPUS
Bibliographic Citation
Optics Letters Vol.47 No.19 (2022) , 5156-5159
Suggested Citation
Nuntakulkaisak T., Bavontaweepanya R., Infahsaeng Y., Wongjom P., Pijitrojana W., Suwanna S., Pongophas E. Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique. Optics Letters Vol.47 No.19 (2022) , 5156-5159. 5159. doi:10.1364/OL.470551 Retrieved from: https://repository.li.mahidol.ac.th/handle/123456789/86913
Title
Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique
Author's Affiliation
Other Contributor(s)
Abstract
A phase-sensitive transparent grating interferometer is proposed to measure small displacements. A transparent grating is inserted between a light source and a reflective mirror. The diffracted light beams of the forward and backward propagation are superposed to form the interference pattern. When two detectors are placed at two different positions of the interference fringe in such a way that the signals have quadrature phase difference, the phase variation can infer the displacement of the reflected mirror. This simple setup can measure the displacement of the mirror at nanometer scale with 98.2% accuracy, high precision with 10 nm in standard deviation, and lowest bound of 0.4 nm resolution.