Publication: Carbon doped tungsten oxide nanorods NO<inf>2</inf>sensor prepared by glancing angle RF sputtering
Issued Date
2013-03-25
Resource Type
ISSN
09254005
Other identifier(s)
2-s2.0-84875141672
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Mahidol University
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SCOPUS
Bibliographic Citation
Sensors and Actuators, B: Chemical. Vol.181, (2013), 388-394
Suggested Citation
Chatchawal Wongchoosuk, Anurat Wisitsoraat, Ditsayut Phokharatkul, Mati Horprathum, Adisorn Tuantranont, Teerakiat Kerdcharoen Carbon doped tungsten oxide nanorods NO<inf>2</inf>sensor prepared by glancing angle RF sputtering. Sensors and Actuators, B: Chemical. Vol.181, (2013), 388-394. doi:10.1016/j.snb.2013.01.066 Retrieved from: https://repository.li.mahidol.ac.th/handle/20.500.14594/31760
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Title
Carbon doped tungsten oxide nanorods NO<inf>2</inf>sensor prepared by glancing angle RF sputtering
Abstract
Metal oxide semiconductor nanostructures offer potential advantages in sensing applications due to their large surface to volume ratio, lower electron recombination rate, and high stability. However, most methods produce nanostructures with random sizes, distribution and orientations, which are not reliable for practical applications because of poor reproducibility. In this work, homogeneous carbon-doped WO3nanorods are developed based on the glancing angle deposition (GLAD) technique using radio-frequency magnetron sputtering and investigated for NO2gas sensing application. The carbon doping is achieved by using acetylene gas as a carbon source. Characterization based on scanning electron microscopy, Auger electron spectroscopy and X-ray diffraction confirm the formation of uniform carbon-doped crystalline WO3nanorods. The gas-sensing results reveal that carbon-doped WO3nanorods sensor exhibits not only high response and selectivity to NO2(0.5-5 ppm) but also at low operating temperature (150 °C) compared with the undoped ones. The observed gas-sensing enhancement may be attributed to the increase of specific surface area and the decrease of activation energy by carbon doping. © 2013 Elsevier B.V.